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Silicon-based transmissive diffractive optical element.

Chien Chieh Lee1, Yu Cheng Chang, Chih Ming Wang

  • 1Optical Science Center, National Central University, Jung-Li 320, Taiwan. jjlee@phy.ncu.edu.tw

Optics Letters
|July 30, 2003
PubMed
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Researchers developed a silicon nitride diffractive optical element (DOE) for optical pickup systems. This advanced DOE efficiently splits and focuses light, integrating seamlessly with laser diodes for CD/DVD applications.

Area of Science:

  • Optoelectronics
  • Microfabrication

Background:

  • Diffractive optical elements (DOEs) are crucial for light manipulation in optical systems.
  • Integrating optical components with semiconductor devices offers miniaturization and enhanced functionality.

Purpose of the Study:

  • To design, fabricate, and test a silicon nitride (SiNx) membrane DOE for beam-splitting and focusing.
  • To evaluate the DOE's performance at visible wavelengths for optical pickup applications.

Main Methods:

  • Fabrication using silicon micromachining technology.
  • Low-pressure chemical-vapor deposition (LPCVD) for SiNx film deposition.
  • Potassium hydroxide (KOH) etching to create the free-standing membrane DOE.

Main Results:

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Last Updated: May 22, 2026

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  • Successful fabrication of a transmissive SiNx membrane DOE.
  • Achieved high diffraction efficiency (>20% for a binary-phase-level element).
  • Experimental results closely matched designed and modeled predictions.

    • Conclusions:

    • The SiNx membrane DOE is a viable component for optical pickup heads.
    • The fabrication process allows for easy integration with laser diode and photodiode chips.
    • The DOE demonstrates efficient beam-splitting and focusing for CD/DVD systems.