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Related Experiment Videos

Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes.

Mohammed H Badi1, Goksen G Yaralioglu, A Sanli Ergun

  • 1E. L. Ginzton Laboratory, Stanford, CA 94305-4088, USA. mbadi@echo.stanford.edu

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|October 17, 2003
PubMed
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This study presents a novel Lamb wave device using capacitive micromachined ultrasonic transducers (CMUTs). The device, fabricated with IC techniques, demonstrates effective Lamb wave generation and sensing, showing promise for mass loading detection.

Area of Science:

  • Materials Science
  • Electrical Engineering
  • Acoustics

Background:

  • Lamb waves are critical for various sensing applications.
  • Capacitive micromachined ultrasonic transducers (CMUTs) offer a pathway for miniaturized acoustic devices.
  • Efficient excitation and detection of specific Lamb wave modes are essential for device performance.

Purpose of the Study:

  • To detail the theory, fabrication, and characterization of a new Lamb wave device utilizing CMUTs.
  • To develop and validate an equivalent circuit model for the CMUT-based Lamb wave transducer.
  • To investigate the dominant Lamb wave mode and power coupling mechanisms within the device.

Main Methods:

  • Fabrication of the device using standard integrated circuit (IC) fabrication techniques.

Related Experiment Videos

  • Development of an equivalent circuit model for the transducer, considering Lamb wave mode resistance.
  • Finite element analysis (FEA) to identify the dominant Lamb wave mode (A0).
  • Experimental characterization including S-parameter measurements, laser vibrometry, and delay-line transmission.

    • Main Results:

    • Successful fabrication of an 18-microm-thick crystalline silicon Lamb wave device operating at 2.1 MHz.
    • An equivalent circuit model accurately predicts experimental observations.
    • FEA confirms the lowest order antisymmetric flexural wave (A0) as the dominant mode.
    • Insertion loss of 20 dB at 2.1 MHz was measured.
    • The device functions effectively as a delay-line oscillator sensor, sensitive to mass loading.

    Conclusions:

    • The developed CMUT-based Lamb wave device is efficiently fabricated using IC techniques.
    • The proposed equivalent circuit model provides accurate predictions for transducer behavior.
    • The device demonstrates robust performance for Lamb wave generation and detection, suitable for sensing applications.
    • The device exhibits sensitivity to mass loading, indicating its potential for sensor development.