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Miniature lamellar grating interferometer based on silicon technology.

Omar Manzardo1, Roland Michaely, Felix Schädelin

  • 1Institute of Microtechnology, University of Neuchâtel, Breguet 2, 2000 Neuchâtel, Switzerland. omar.manzardo@unine.ch

Optics Letters
|July 21, 2004
PubMed
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We developed a microelectromechanical system (MEMS) lamellar grating interferometer for spectroscopy. This novel device achieves high-resolution spectral measurements of white-light sources, paving the way for advanced optical sensing applications.

Area of Science:

  • Optical Engineering
  • Spectroscopy
  • Microelectromechanical Systems (MEMS)

Background:

  • Fourier-transform spectroscopy (FTS) is a powerful technique for spectral analysis.
  • MEMS technology offers miniaturization and integration potential for optical instruments.
  • Developing compact and high-performance spectrometers remains a key challenge in optical sensing.

Purpose of the Study:

  • To present a novel lamellar grating interferometer realized using MEMS technology.
  • To utilize the device as a time-scanning Fourier-transform spectrometer.
  • To demonstrate its capability for high-resolution spectral measurements of white-light sources.

Main Methods:

  • Fabrication of the lamellar grating interferometer using silicon-on-insulator (SOI) technology.

Related Experiment Videos

  • Integration of an electrostatic comb drive actuator for precise motion control.
  • Time-scanning operation for Fourier-transform spectral acquisition.

    • Main Results:

    • Achieved spectral resolution of 1.6 nm at 400 nm and 5.5 nm at 800 nm.
    • Demonstrated wavelength accuracy better than 0.5 nm across the 380-1100 nm range.
    • Device dimensions are 5 mm x 5 mm with a maximum optical path difference of 145 microm.

    Conclusions:

    • The MEMS-based lamellar grating interferometer represents a significant advancement in miniaturized spectroscopy.
    • The demonstrated performance metrics highlight its potential for various applications requiring compact spectral analysis.
    • This work showcases the feasibility of integrating complex optical functionalities into microfabricated devices.