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Related Experiment Videos

Quantitative electron probe microanalysis of rough targets: testing the peak-to-local background method.

Dale E Newbury1

  • 1Surface and Microanalysis Science Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8371, USA. dale.newbury@nist.gov

Scanning
|July 31, 2004
PubMed
Summary

Analyzing rough samples with electron beam X-ray microanalysis is challenging. The peak-to-local background (P/B) method improves accuracy by correcting for geometric effects in energy-dispersive X-ray spectrometry.

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Quantitative electron beam X-ray microanalysis using energy-dispersive X-ray spectrometry faces challenges with rough samples.
  • Surface topography significantly impacts electron scattering and X-ray absorption, leading to systematic errors in conventional analysis.

Purpose of the Study:

  • To address the challenges of quantitative analysis on rough samples in electron beam X-ray microanalysis.
  • To present a method for improving accuracy when analyzing specimens with topography.

Main Methods:

  • Minimizing geometric effects by reorienting specimens using a multi-axis sample stage.
  • Applying the peak-to-local background (P/B) method for corrections on rough samples.
  • Determining correction factors using reference background spectra (measured or calculated).

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Main Results:

  • The peak-to-local background (P/B) method allows for corrections of geometric factors on rough samples.
  • Correction factors can be determined as a function of photon energy.
  • Significant accuracy improvements are achieved compared to conventional analysis with simple normalization.

Conclusions:

  • The P/B method offers a practical approach to improve the accuracy of quantitative analysis for rough samples.
  • Specimen reorientation and advanced correction methods are crucial for reliable results in electron beam X-ray microanalysis of non-ideal surfaces.