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Electron-Excited X-ray Microanalysis by Energy Dispersive Spectrometry at 50: Analytical Accuracy, Precision, Trace

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Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
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Energy dispersive X-ray spectrometry (EDS) has evolved into a highly accurate quantitative analysis tool for electron microanalysis. Modern EDS provides precise elemental composition and mapping, even for trace elements and low atomic number materials.

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compositional mappingelectron-excited X-ray microanalysisenergy dispersive X-ray spectrometry

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • The 50th anniversary of semiconductor detector-based energy dispersive X-ray spectrometry (EDS) in electron-excited X-ray microanalysis was marked in 2018.
  • Initially limited to qualitative analysis, EDS has undergone significant development.

Purpose of the Study:

  • To highlight the advancements in EDS technology for quantitative analysis.
  • To demonstrate the capabilities of modern EDS in elemental determination and compositional mapping.

Main Methods:

  • Utilizing semiconductor detectors for energy dispersive X-ray spectrometry.
  • Performing quantitative analysis for major, minor, and trace constituents.
  • Analyzing low atomic number elements (B, C, N, O, F) at low beam energies.
  • Conducting quantitative compositional mapping by recording full EDS spectra at each picture element.

Main Results:

  • EDS now matches wavelength dispersive spectrometry in accuracy for major and minor constituents.
  • Useful accuracy extends to trace constituent analysis, even with peak interferences.
  • Accurate analysis of low atomic number elements is achievable.
  • Low beam energy optimizes spatial resolution.
  • Comprehensive quantitative compositional mapping is feasible.

Conclusions:

  • Energy dispersive X-ray spectrometry is a powerful quantitative analytical technique.
  • Modern EDS offers high accuracy and versatility for elemental analysis and mapping in microanalysis.
  • The technique is suitable for a wide range of elements and concentrations, including challenging low atomic number elements.