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Active pixel sensor array as a detector for electron microscopy.

Anna-Clare Milazzo1, Philippe Leblanc, Fred Duttweiler

  • 1University of California at San Diego, 9500 Gilman Dr., La Jolla, CA 92093, USA.

Ultramicroscopy
|May 14, 2005
PubMed
Summary
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A new active pixel sensor (APS) offers potential for high-resolution transmission electron microscopy (TEM) imaging. Eliminating backscattered electrons by thinning the silicon substrate is key to achieving optimal signal-to-noise and spatial resolution.

Area of Science:

  • Materials Science
  • Physics
  • Electron Microscopy

Background:

  • Current detectors like film and CCD cameras limit efficient 3-D high-resolution particle reconstruction in transmission electron microscopy (TEM).
  • A need exists for advanced, high-resolution recording devices for TEM applications.

Purpose of the Study:

  • To evaluate an active pixel sensor (APS) array as a potential replacement for existing TEM detectors.
  • To assess the performance of an APS prototype for high-resolution particle reconstruction.

Main Methods:

  • An APS prototype (64x64 pixels, 20 microm pixel pitch) was tested at 200, 300, and 400 keV on JEOL JEM-2000 FX II and JEM-4000 EX electron microscopes.
  • Single-electron events were measured using low beam intensity.
  • Simulations were performed to understand electron backscattering phenomena within the silicon substrate.

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Main Results:

  • The APS exhibited a Landau distribution for low-energy deposited electrons, with unexpected events at higher energies attributed to backscattered electrons re-entering the sensor.
  • Simulations confirmed the significant impact of backscattered electrons.
  • Extrapolating to a thinned substrate (<30 microm), an estimated signal-to-noise ratio of approximately 10:1 and a spatial resolution of about 10 microm were determined for the 200-400 keV range.

Conclusions:

  • Backscattering of electrons within the silicon substrate poses a challenge for APS usability in TEM.
  • Thinning the silicon substrate to less than 30 microm is crucial for mitigating backscattered electron events.
  • A back-thinned APS detector shows promise for achieving high-resolution TEM imaging with improved signal-to-noise and spatial resolution.