Precursor chemistry for TiO2: titanium complexes with a mixed nitrogen/oxygen ligand sphere

Arne Baunemann1, Malte Hellwig, Ashish Varade

  • 1Lehrstuhl für Anorganische Chemie II, Universitätsstr. 150, Ruhr-University Bochum, Bochum, 44780, Germany.

Summary

New titanium amido-malonato complexes were synthesized for Metal-Organic Chemical Vapor Deposition (MOCVD). The study found that ligand substitution significantly impacts thermal properties, making specific complexes suitable for either classical MOCVD or liquid injection-MOCVD, with one showing promise for TiO2 thin film deposition.

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