Related Experiment Video
Updated: Jul 17, 2026
18:11
Microfluidic Chips Controlled with Elastomeric Microvalve Arrays
Published on: October 1, 2007
A class of low voltage, elastomer-metal 'wet' actuators for use in high-density microfluidics
Tushar Bansal1, Meng-Ping Chang, Michel M Maharbiz
1Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, USA. tbansal@umich.edu
Lab on a Chip
|February 3, 2007
Abstract:
We report a class of 'wet' MEMS elastomer-metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.
