Xinjun Wan1, Duo Li, Shulian Zhang
1State Key Laboratory of Precision Measurements, Department of Precision Instruments, Tsinghua University, Beijing, China. wanxj02@mails.tsinghua.edu.cn
You might also read
Articles linked to this work by shared authors, journal, and citation graph.
This study introduces a novel laser feedback interferometer for precise displacement measurement. The system achieves sub-2 nm resolution and 8 nm accuracy, enabling sensitive detection of target movements.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: