Win X-ray: a new Monte Carlo program that computes X-ray spectra obtained with a scanning electron microscope

Area of Science:

• Materials Science
• Analytical Chemistry
• Physics

Background:

• Scanning Electron Microscopy (SEM) coupled with Energy Dispersive Spectrometry (EDS) is crucial for material analysis.
• Accurate prediction of X-ray spectra is essential for optimizing analytical conditions and interpreting results.
• Existing simulation methods may have limitations in handling complex sample geometries.

Purpose of the Study:

• To introduce Win X-ray, a novel Monte Carlo program for simulating X-ray spectra.
• To provide the underlying equations for the Monte Carlo simulation model.
• To demonstrate the program's utility in optimizing SEM-EDS analysis and exploring spectral characteristics.

Main Methods:

• Development of a new Monte Carlo program named Win X-ray.
• Implementation of underlying equations for X-ray spectra simulation.
• Simulation of spectra for conventional thick samples within an energy range of 10-40 keV.

Main Results:

• Win X-ray successfully predicts X-ray spectra for SEM-EDS analysis.
• The program facilitates the establishment of optimal analytical conditions.
• It aids in determining detection limits and identifying potential peak overlaps.

Conclusions:

• Win X-ray is a valuable tool for simulating X-ray spectra in SEM-EDS.
• The program's current focus is on conventional thick samples, with future potential for complex geometries.
• Validation and refinement of the program are key for broader applications in microanalysis.