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Updated: Jul 13, 2026

Fabrication of a Solution-gated Indium-Tin-Oxide-based One-piece Transistor Enabling Sensitive Biosensing
Published on: August 29, 2025
SiGe optoelectronic metal-oxide semiconductor field-effect transistor.
Ali K Okyay1, Abhijit J Pethe, Duygu Kuzum
1Center for Integrated Systems, Stanford University, Stanford, California 94305, USA. aokyay@stanford.edu
We developed a novel nanoscale optoelectronic switch combining a Germanium (Ge) optical detector and a Silicon (Si) metal-oxide semiconductor field-effect transistor (MOSFET). This integrated device offers significant improvements in responsivity and reduced off-state current for optical signaling.
Area of Science:
- Semiconductor optoelectronics
- Nanoscale device fabrication
- Integrated photonics
Background:
- Traditional optical detectors and transistors are separate components, leading to larger footprints and potential signal loss.
- Existing solutions lack efficient integration for nanoscale optoelectronic switching at telecommunication wavelengths.
Purpose of the Study:
- To propose and validate a novel fused Germanium (Ge) optical detector and Silicon (Si) metal-oxide semiconductor field-effect transistor (MOSFET) optoelectronic switch.
- To demonstrate nanoscale fabrication, low capacitance, and high performance for optical signaling applications.
Main Methods:
- Device operation was investigated using both simulations and experimental validation.
- Fabrication was performed at the nanoscale, focusing on integrating Ge and Si components.
- Performance metrics including current gain, responsivity, and off-state current were measured.
Main Results:
- A novel optoelectronic switch integrating a Ge detector and Si MOSFET was successfully fabricated at the nanoscale.
- Experimental current gain reached up to 1000x, with responsivity approximately 3.5x higher than traditional schemes.
- The device demonstrated a significantly lower off-state current, approximately 4x lower than conventional detectors.
Conclusions:
- The proposed Ge-Si optoelectronic switch offers a promising solution for high-performance, integrated optical signaling.
- The device's nanoscale fabrication, low capacitance, and improved performance metrics make it suitable for telecommunication standard wavelengths with enhanced noise immunity.
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