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Mistakes encountered during automatic peak identification in low beam energy X-ray microanalysis
1National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA. dale.newbury@nist.gov
Scanning
|August 7, 2007
Summary
Automated peak identification in low voltage scanning electron microscopy (LVSEM) using energy dispersive X-ray spectrometry (EDS) often fails. Robust identification requires peak fitting that uses the full peak shape, not just a single channel.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Automated peak identification in electron beam excited X-ray microanalysis using energy dispersive X-ray spectrometry (EDS) can be inaccurate.
- This inaccuracy is amplified in low beam energy scanning electron microscopy (LVSEM) (≤5 keV).
- LVSEM necessitates using low fluorescence yield L- and M-shell peaks, unlike conventional high beam energy (>10 keV) analysis.
Purpose of the Study:
- To address the challenges of automated peak identification in LVSEM.
- To highlight the limitations of single-channel peak characterization in EDS.
- To propose a more robust method for automated peak identification.
Main Methods:
- Analysis of peak identification mistakes in LVSEM.
- Identification of potential problematic peak overlaps based on energy proximity.
- Evaluation of peak fitting utilizing the full peak shape for improved accuracy.
Main Results:
- Automated EDS peak identification errors occur even with high-intensity peaks in LVSEM.
- Convolved L- and M-shell peaks (e.g., Lα-Lβ) can shift peak channel values by ≥20 eV.
- Single-channel characterization is insufficient for reliable EDS peak identification in LVSEM.
Conclusions:
- Robust automated peak identification in LVSEM requires advanced peak fitting algorithms.
- Utilizing the full EDS peak shape is crucial for accurate elemental analysis.
- Improved peak identification methods are necessary for reliable microanalysis in LVSEM.
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