Functional integrated optical elements for beam shaping with coherence scrambling property, realized by interference...

Area of Science:

• Optics and Photonics
• Laser Technology
• Diffractive Optics

Background:

• Homogenous laser beam illumination is crucial for applications such as semiconductor lithography and material processing.
• Existing solutions may lack multifunctionality or require complex setups.

Purpose of the Study:

• To present a combined single-element homogenizer with coherence scrambling capability for excimer laser applications.
• To demonstrate the integration of these properties into a single diffractive optical element.

Main Methods:

• Holographic interference lithography was employed to fabricate the diffractive optical element.
• The design incorporates an off-axis configuration for coherence scrambling.
• Geometrical adaptation of the optical setup was necessary due to wavelength differences between recording and application.

Main Results:

• Experimental verification confirmed the successful implementation of the combined single-element homogenizer.
• The diffractive optical element achieved homogenous field illumination.
• The setup demonstrated effective coherence scrambling for excimer laser applications.

Conclusions:

• The developed diffractive optical element offers a compact and multifunctional solution for laser beam shaping.
• This technology advances capabilities in semiconductor lithography and material processing requiring precise laser control.