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Updated: Jul 10, 2026

Atom Probe Tomography Analysis of Exsolved Mineral Phases
Published on: October 25, 2019
Review of atom probe FIB-based specimen preparation methods
Michael K Miller1, Kaye F Russell, Keith Thompson
1Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6136, USA. millermk@ornl.gov
Abstract:
Several FIB-based methods that have been developed to fabricate needle-shaped atom probe specimens from a variety of specimen geometries, and site-specific regions are reviewed. These methods have enabled electronic device structures to be characterized. The atom probe may be used to quantify the level and range of gallium implantation and has demonstrated that the use of low accelerating voltages during the final stages of milling can dramatically reduce the extent of gallium implantation.
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