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Updated: Jul 9, 2026

Preparation and Observation of Thick Biological Samples by Scanning Transmission Electron Tomography
Published on: March 12, 2017
Imaging modes for scanning confocal electron microscopy in a double aberration-corrected transmission electron
P D Nellist1, E C Cosgriff, G Behan
1Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK. peter.nellist@materials.ox.ac.uk
Aberration correction in electron microscopy enables optical sectioning for clearer imaging. Scanning confocal electron microscopy (SCEM) offers superior depth resolution compared to traditional methods.
Area of Science:
- Electron Microscopy
- Materials Science
- Nanotechnology
Background:
- Aberration correction in electron microscopes reduces the focal depth of field.
- This reduced depth of field enables optical sectioning to probe specific sample depths.
- Scanning transmission electron microscopy (STEM) utilizes optical sectioning for depth analysis.
Purpose of the Study:
- To survey coherent and incoherent imaging modes for scanning confocal electron microscopy (SCEM).
- To provide expressions describing SCEM imaging.
- To compare the depth response of SCEM with optical sectioning in STEM.
Main Methods:
- Utilizing an electron microscope with aberration correctors for pre- and post-specimen optics.
- Operating the microscope in a confocal mode (SCEM).
- Performing Bloch wave calculations for SCEM geometry with defocused optics.
Main Results:
- SCEM provides improved depth resolution and selectivity over optical sectioning in STEM.
- Calculations demonstrate the depth response of SCEM.
- Depth resolution in crystalline matrices was explored using Bloch wave calculations.
Conclusions:
- SCEM offers enhanced depth probing capabilities in electron microscopy.
- The developed imaging modes and calculations are crucial for SCEM applications.
- SCEM represents a significant advancement for high-resolution subsurface imaging.
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