A rod-shaped vibro touch sensor using PZT thin film.

Area of Science:

• Materials Science
• Mechanical Engineering
• Nanotechnology

Background:

• High-precision measurement requires advanced sensing technologies.
• Existing sensors face limitations in sensitivity and resolution for certain applications.
• Scanning Probe Microscopes (SPM) demand highly accurate probe systems.

Purpose of the Study:

• To fabricate a novel probe sensor for high-precision coordinate measuring machines, surface roughness tools, and SPM.
• To utilize a vibrating rod actuated and detected by PZT thin film.
• To evaluate the performance of the fabricated sensor.

Main Methods:

• Fabrication of a probe sensor comprising a 27.8-mm long rod.
• Excitation and detection of longitudinal vibration using PZT (lead zirconate titanate) thin film.
• Fabrication of PZT thin film via a hydrothermal method involving hot and high-pressure aqueous solutions.

Main Results:

• The sensor achieved a resonance frequency of 116 kHz.
• Experimental evaluation demonstrated successful oscillation of the rod.
• Successful detection of contact was achieved, validating the sensor's functionality.

Conclusions:

• The developed PZT-based probe sensor is suitable for high-precision measurement applications.
• The hydrothermal fabrication method is effective for producing functional PZT thin films for sensors.
• The sensor shows promise for enhancing the capabilities of coordinate measuring machines and SPM.