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Updated: Jul 7, 2026

Synthesis and Exfoliation of Discotic Zirconium Phosphates to Obtain Colloidal Liquid Crystals
Published on: May 25, 2016
Influence of crystal structure on the light scatter of zirconium oxide films
Abstract:
The relationship of light scatter by a thin film to thin-film morphology is examined. Light scatter by reactively evaporated ZrO(2) thin films is analyzed by using in situ total internal reflection microscopy and angle-resolved scatterometry. Film crystal structure is analyzed by transmission electron microscopy and x-ray diffraction. Relations between film crystal structure and film scatter are established by using this information. Surface topography is analyzed by the use of scanning force microscopy. Results of a spectrophotometric determination of the film refractive index are reported. The film scatter is found to be sensitive to the crystal phase of the film, which is a function of substrate deposition temperature. A simple method of separating bulk from surface scatter is described.
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