Fabrication and scanning-angle temperature dependence of metal-based, optical resonant scanners with PZT actuation

Metal-based, optical scanning devices with a large mirror size of 1 mm(2) and a wide scanning angle of over 90 degrees were fabricated. A high optical scanning angle (90 degrees ) was achieved at a resonance frequency of 7.33 kHz and a driving voltage of 80 V (peak-to-peak) in ambient air without vacuum packaging. We compared the performance of metal-based, optical scanners driven by PZT bulk ceramic and aerosol-deposited PZT thick films over the temperature range from -20 degrees C to 80 degrees C in an environmental chamber.