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Updated: Jul 2, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
07:17

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry

Published on: August 1, 2017

Atomic hydrogen beam source: a convenient, extended cavity, microwave discharge design.

E J Murphy1, J H Brophy

  • 1Massachusetts Institute of Technology, Department of Chemistry, Cambridge, Massachusetts 02139.

The Review of Scientific Instruments
|May 1, 1979
PubMed
Summary

A novel extended cavity design for microwave discharge sources produces intense atomic hydrogen beams. This innovative approach minimizes wall losses and simplifies engineering for efficient species production in vacuum.

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