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Updated: Jul 2, 2026

Microscopic Visualization of Porous Nanographenes Synthesized through a Combination of Solution and On-Surface Chemistry
Published on: March 4, 2021
Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis
Ravikiran Attota1, Thomas A Germer, Richard M Silver
1National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. ravikiran.attota@nist.gov
Abstract:
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanometrology, nanomanufacturing, semiconductor process control, and biotechnology.
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