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Development of a 3D Graphene Electrode Dielectrophoretic Device
Published on: June 22, 2014
Electrostatic force assisted exfoliation of prepatterned few-layer graphenes into device sites
Xiaogan Liang1, Allan S P Chang, Yuegang Zhang
1Molecular Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA. xliang@lbl.gov
Nano Letters
|December 17, 2008
Summary
Researchers developed a new method to create few-layer graphene (FLG) patterns on silicon wafers using electrostatic exfoliation. This technique enables the fabrication of nanoscale graphene features for electronic devices.
Area of Science:
- Materials Science
- Nanotechnology
- Electrical Engineering
Background:
- Fabricating nanoscale graphene structures is crucial for advanced electronic devices.
- Existing methods for graphene transfer often require additional adhesion layers and can be complex.
Purpose of the Study:
- To introduce a novel, single-step method for fabricating few-layer graphene (FLG) features on substrates.
- To demonstrate the precise patterning of graphene nanostructures using electrostatic exfoliation and printing.
- To enable the development of graphene-based integrated circuits.
Main Methods:
- Patterning highly oriented pyrolytic graphite using standard lithography.
- Employing a single-step electrostatic exfoliation and transfer-printing process to deposit FLG features onto silicon wafers.
- Utilizing the fabricated graphene nanolines to create graphene nanoribbon transistors.
Main Results:
- Successfully exfoliated and printed 18 nm wide FLG nanolines and 1.4 µm diameter pillars.
- Fabricated functional graphene nanoribbon transistors using the patterned FLG nanolines.
- Demonstrated a process that does not require additional adhesion layers.
Conclusions:
- The electrostatic force-assisted exfoliation/print process offers a scalable and efficient method for graphene fabrication.
- This technique facilitates the creation of wafer-sized patterned graphitic material.
- The method paves the way for the construction of complex graphene-based integrated circuits.
