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Published on: June 14, 2019
Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage.
H Xie1, M Rakotondrabe, S Régnier
1Institute of Intelligent System and Robotics, University of Pierre and Marie Curie/CNRS UMR 7222, 4 Place Jussieu, 75005 Paris, France.
The Review of Scientific Instruments
|May 2, 2009
Summary
A new method accurately calibrates piezoscanner hysteresis and creep using an atomic force microscope (AFM) and a nanopositioning stage. This technique enhances nanomanipulation system performance without requiring equipment modifications.
Area of Science:
- Nanotechnology
- Metrology
- Materials Science
Background:
- Piezoscanners are crucial for precise motion control in nanomanipulation systems.
- Hysteresis and creep in piezoscanners introduce significant errors, limiting accuracy.
- Characterizing these errors is essential for improving nanomanipulation performance.
Purpose of the Study:
- To develop and validate a method for accurately characterizing piezoscanner hysteresis and creep.
- To leverage existing atomic force microscope (AFM) infrastructure for precise metrology.
- To enable improved voltage input estimation based on reference displacement.
Main Methods:
- Utilized an atomic force microscope (AFM) with optical levers as a displacement sensor.
- Integrated a closed-loop nanopositioning stage for reference displacement measurement.
- Employed lateral tracking of a defined slope in tapping mode to measure relative piezoscanner movement.
- Configured the piezoscanner and nanopositioning stage with identical axial arrangements.
Main Results:
- Accurately calibrated piezoscanner hysteresis and creep.
- Demonstrated the method's effectiveness within the existing AFM-based nanomanipulation system.
- Validated the ability to estimate piezoscanner voltage input against reference displacement.
Conclusions:
- The developed method provides an accurate and accessible means to calibrate piezoscanner nonlinearities.
- No modifications or additional devices are needed, making it a practical solution.
- This calibration improves the reliability and precision of AFM-based nanomanipulation systems.
