Related Experiment Video
Updated: Jun 23, 2026
09:45
Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
Published on: June 12, 2018
A control approach to high-speed probe-based nanofabrication
Yan Yan1, Qingze Zou, Zhiqun Lin
1Department of Mechanical Engineering, Iowa State University, Ames, IA 50011, USA.
Nanotechnology
|May 8, 2009
Summary
This study introduces a novel control method to enhance the speed and range of probe-based nanofabrication. The technique overcomes limitations like piezoactuator hysteresis and vibrational dynamics for precise 3D positioning.
Area of Science:
- Nanotechnology
- Mechanical Engineering
- Control Systems
Background:
- Probe-based nanofabrication offers high potential but is limited by low throughput.
- Challenges include nonlinear hysteresis and vibrational dynamics of piezoactuators.
- Dynamic coupling in multi-axis motion further hinders high-speed operation.
Purpose of the Study:
- To propose an inversion-based feedforward control approach for high-speed, large-range probe-based nanofabrication.
- To overcome adverse effects limiting current nanofabrication techniques.
- To achieve precision probe positioning during complex multi-axis movements.
Main Methods:
- Utilized a model-less inversion-based iterative control technique.
- Applied the control method to scanning probe microscope-based nanofabrication.
- Implemented the approach experimentally for mechanical scratching.
Main Results:
- Achieved precision position control of the probe during high-speed, large-range multi-axis nanofabrication.
- Successfully fabricated large-size (approx. 50 microm) pentagram patterns.
- Demonstrated high-speed fabrication at approximately 4.5 mm s(-1) on a gold-coated silicon surface.
Conclusions:
- The proposed inversion-based feedforward control effectively addresses limitations in probe-based nanofabrication.
- Enables high-speed and large-range operation with precision control.
- Paves the way for improved throughput in nanoscale fabrication processes.
