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Updated: Jun 22, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
A 1800 K furnace designed for in situ synchrotron microtomography
1Technical University Dresden, Institute of Materials Science, Dresden, Germany.
Abstract:
A radiation furnace that covers the temperature range from room temperature up to 1800 K has been designed and constructed for in situ synchrotron microtomography. The furnace operates under a vacuum or under any inert gas atmosphere. The two 1000 W halogen heating lamps are water- and air-cooled. The samples are located at the focus of these lamp reflectors on a rotary feedthrough that is connected to a driving rotation stage below the furnace. The X-ray beam penetrates the furnace through two X-ray-transparent vacuum-sealed windows. Further windows can be used for temperature control, sample changing and gas inflow and outflow.
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