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Updated: Jun 22, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
STEM imaging of 47-pm-separated atomic columns by a spherical aberration-corrected electron microscope with a 300-kV
Hidetaka Sawada1, Yasumasa Tanishiro, Nobuhiro Ohashi
1Japan Science and Technology Agency, CREST, 5 Sanbancho, Chiyoda-ku, Tokyo, Japan. hsawada@jeol.co.jp
Abstract:
A spherical aberration-corrected electron microscope has been developed recently, which is equipped with a 300-kV cold field emission gun and an objective lens of a small chromatic aberration coefficient. A dumbbell image of 47 pm spacing, corresponding to a pair of atomic columns of germanium aligned along the [114] direction, is resolved in high-angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) with a 0.4-eV energy spread of the electron beam. The observed image was compared with a simulated image obtained by dynamical calculation.
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