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Updated: Jun 20, 2026

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Femtosecond Laser Filaments for Use in Sub-Diffraction-Limited Imaging and Remote Sensing
Published on: April 25, 2019
Diffraction-limited soft-x-ray projection imaging using a laser plasma source
Optics Letters
|September 25, 2009
Abstract:
Projection imaging of 0.1-microm lines and spaces is demonstrated with a Mo/Si multilayer coated Schwarzschild objective and 14-nm illumination from a laser plasma source. This structure has been etched into a silicon wafer by using a trilevel resist and reactive ion etching. Low-contrast modulation at 0.05-microm lines and spaces is observed in polymethylmethacrylate.
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