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Atomic force microscopy with a 12-electrode piezoelectric tube scanner
Yuen K Yong1, Bilal Ahmed, S O Reza Moheimani
1School of Electrical Engineering and Computer Science, The University of Newcastle, University Drive, New South Wales 2308, Australia.
The Review of Scientific Instruments
|April 8, 2010
Summary
This study introduces a novel piezoelectric tube scanner for simultaneous sensing and actuation. The new design significantly improves atomic force microscope imaging by damping resonance and enhancing image quality in closed-loop operation.
Area of Science:
- Instrumentation
- Materials Science
- Nanotechnology
Background:
- Atomic Force Microscopy (AFM) requires precise scanning mechanisms.
- Simultaneous sensing and actuation in scanners can improve performance.
- Existing piezoelectric scanners face challenges with resonance and control.
Purpose of the Study:
- To present a novel piezoelectric tube scanner with a unique electrode pattern.
- To demonstrate its capability for simultaneous sensing and actuation.
- To improve AFM imaging through enhanced control and reduced resonance.
Main Methods:
- Designed a piezoelectric tube scanner with an antisymmetrical electrode pattern.
- Implemented a positive position feedback (PPF) controller to damp resonance.
- Utilized piezoelectric strain-induced voltage for feedback measurement.
- Tested the scanner in an AFM for imaging a grating at various scan rates.
Main Results:
- The novel electrode pattern enables collocated sensing and actuation.
- The PPF controller effectively damped the scanner's resonance.
- Closed-loop AFM images showed significant superiority over open-loop images.
- Improved imaging quality was observed at scan rates of 10, 15.6, and 31 Hz.
Conclusions:
- The developed piezoelectric tube scanner effectively integrates sensing and actuation.
- The PPF control strategy enhances scanner stability and performance.
- This technology offers a significant advancement for high-resolution imaging in AFM.
