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Updated: Jun 13, 2026

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
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Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Published on: January 27, 2017

High-throughput three-dimensional lithographic microfabrication.

Daekeun Kim1, Peter T C So

  • 1Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue,Cambridge, Massachusetts 02139, USA.

Optics Letters
|May 19, 2010
PubMed
Summary
This summary is machine-generated.

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A novel 3D lithography technique enables high-throughput, scalable manufacturing of arbitrary microdevices. This method uses femtosecond laser pulses for precise 3D pattern fabrication, paving the way for industrial applications.

Area of Science:

  • Optics and Photonics
  • Materials Science
  • Microfabrication Technologies

Background:

  • Advanced microfabrication techniques are crucial for developing 3D microdevices.
  • Existing methods may face limitations in throughput, scalability, or pattern complexity.

Purpose of the Study:

  • To develop a high-throughput, scalable 3D lithographic microfabrication process.
  • To demonstrate the capability of producing arbitrary 3D patterns for microdevice manufacturing.

Main Methods:

  • Utilized depth-resolved wide-field illumination with temporally focused femtosecond light pulses.
  • Characterized the axial resolution of the developed technique.
  • Performed proof-of-concept experiments including photobleaching and SU-8 photoresist microstructuring.

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Planar and Three-Dimensional Printing of Conductive Inks

Published on: December 9, 2011

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Last Updated: Jun 13, 2026

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
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Published on: January 27, 2017

Microfabrication of Chip-sized Scaffolds for Three-dimensional Cell cultivation
09:37

Microfabrication of Chip-sized Scaffolds for Three-dimensional Cell cultivation

Published on: May 12, 2008

Planar and Three-Dimensional Printing of Conductive Inks
10:49

Planar and Three-Dimensional Printing of Conductive Inks

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Main Results:

  • Achieved high-throughput and scalable fabrication of arbitrary 3D patterns.
  • Axial resolution was characterized and found to be consistent with theoretical predictions.
  • Successfully demonstrated 3D resolved pattern photobleaching and fabrication of 3D microstructures.

Conclusions:

  • The developed 3D lithography process is suitable for industrial-scale manufacturing of complex 3D microdevices.
  • Potential applications include photonic crystals, tissue engineering scaffolds, and microfluidics chips.
  • The technique offers a promising route for advanced microdevice fabrication.