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Optical phase modulators using deformable waveguides actuated by micro-electro-mechanical systems.

Wei-Chao Chiu1, Chun-Che Chang, Jiun-Ming Wu

  • 1Institute of Photonics Technologies, National Tsing Hua University, HsinChu 300, Taiwan.

Optics Letters
|April 12, 2011
PubMed
Summary
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This study introduces a micro-electro-mechanical systems (MEMS) optical phase modulator that achieves a 0.4π phase shift by stretching silicon waveguides. The device demonstrates low power consumption, making it suitable for optical applications.

Area of Science:

  • Photonics and Materials Science
  • Optoelectronics and Microfabrication

Background:

  • Optical phase modulators are crucial components in photonic integrated circuits.
  • Existing modulators often face challenges with power consumption and polarization dependence.

Purpose of the Study:

  • To develop a novel optical phase modulator utilizing micro-electro-mechanical systems (MEMS).
  • To actuate deformable silicon waveguides for efficient phase modulation.
  • To investigate the performance of the MEMS-based modulator for both TE- and TM-polarized light.

Main Methods:

  • Fabrication of a phase modulator using MEMS technology to actuate silicon waveguides.
  • Mechanical stretching of waveguide length to induce optical path extension and phase shift.
  • Experimental characterization of phase shift and power consumption for cascaded modulation units.

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Main Results:

  • Achieved a phase shift of approximately 0.4π at an applied voltage of 200 V.
  • Demonstrated effective modulation for both transverse electric (TE) and transverse magnetic (TM) polarized waves.
  • Observed low power consumption, estimated below 0.2 mW at 200 V, attributed to leakage current.

Conclusions:

  • The presented MEMS optical phase modulator offers a viable solution for efficient phase control in silicon photonics.
  • The device exhibits polarization-independent operation and low power consumption.
  • Experimental results align well with theoretical predictions, validating the design approach.