Mechanical reinforcement of nanoparticle thin films using atomic layer deposition

Majemite I Dafinone1, Gang Feng, Teresa Brugarolas

  • 1Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States.

ACS Nano
|May 12, 2011
PubMed
Summary

Atomic layer deposition (ALD) significantly enhances the mechanical durability of titanium dioxide/silicon dioxide nanoparticle thin films (NTFs). This low-temperature method improves abrasion resistance without compromising essential optical and surface properties.

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