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Updated: May 31, 2026
Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Published on: June 13, 2023
High resolution surface morphology measurements using EBSD cross-correlation techniques and AFM
M D Vaudin1, G Stan, Y B Gerbig
1Ceramics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. mark.vaudin@nist.gov
Abstract:
The surface morphology surrounding wedge indentations in (001) Si has been measured using electron backscattered diffraction (EBSD) and atomic force microscopy (AFM). EBSD measurement of the lattice displacement field relative to a strain-free reference location allowed the surface uplift to be measured by summation of lattice rotations about the indentation axis. AFM was used in intermittent contact mode to determine surface morphology. The height profiles across the indentations for the two techniques agreed within 1 nm. Elastic uplift theory is used to model the data.
