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Updated: May 28, 2026

Silicon Metal-oxide-semiconductor Quantum Dots for Single-electron Pumping
Published on: June 3, 2015
Energy-band engineering for improved charge retention in fully self-aligned double floating-gate single-electron
Xiaohui Tang1, Christophe Krzeminski, Aurélien Lecavelier des Etangs-Levallois
1Institute of Information and Communication Technologies, Electronics and Applied Mathematics (ICTEAM), Université catholique de Louvain, Place du Levant, 3, B-1348 Louvain-la-Neuve, Belgium. xiaohui.tang@uclouvain.be
Abstract:
We present a new fully self-aligned single-electron memory with a single pair of nano floating gates, made of different materials (Si and Ge). The energy barrier that prevents stored charge leakage is induced not only by quantum effects but also by the conduction-band offset that arises between Ge and Si. The dimensions and position of each floating gate are well-defined and controlled. The devices exhibit a long retention time and single-electron injection at room temperature.
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