Biocompatible nanolayered polymerization of MEMS devices

Sri Divya Vidyala1, Waseem Asghar, Samir M Iqbal

  • 1Bioengineering Department, Nanotechnology Research and Teaching Facility, University of Texas at Arlington, TX 76019, USA.

Summary

Polymeric nanolayers were deposited onto solid substrates using vacuum deposition. These biocompatible coatings exhibit excellent chemical stability, making them suitable for medical implants and microelectromechanical systems.

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