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Related Experiment Video

Updated: May 25, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Single-shot profilometry of rough surfaces using hyperspectral interferometry.

Taufiq Widjanarko¹, Jonathan M Huntley, Pablo D Ruiz

¹Wolfson School of Mechanical and Manufacturing Engineering, Loughborough University, Loughborough, UK.

|February 3, 2012

Summary

This summary is machine-generated.

Hyperspectral interferometry measures 3D surface profiles in a single shot, even on rough surfaces with speckle. This technique achieves high repeatability for applications like roughness measurement.

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Area of Science:

Optical Metrology
Surface Characterization

Background:

White light interferometry and hyperspectral imaging are established techniques.
Hyperspectral interferometry combines these for advanced 3D surface profiling.
Application to optically rough surfaces with speckle is a novel challenge.

Purpose of the Study:

To evaluate hyperspectral interferometry for 3D surface profiling of optically rough surfaces.
To assess the technique's performance in the presence of speckle-induced phase shifts.
To demonstrate its potential for rapid, non-cooperative measurements.

Main Methods:

Combining white light interferometry with hyperspectral imaging.
Analyzing intensity versus wavenumber signals at each pixel.
Conducting experiments with controlled rigid body translation of samples.

Main Results:

Demonstrated unambiguous range information despite speckle.
Achieved a measurement repeatability of 460 nm.
Utilized a spectral bandwidth of approximately 30 nm.

Conclusions:

Hyperspectral interferometry is effective for 3D surface profiling of rough, speckled surfaces.
The technique offers high repeatability and potential for rapid measurements.
Suitable for roughness measurement and coordinate measurement machine probes.