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Published on: November 3, 2016
Angular distribution of plasma in the vacuum arc ion source.
A G Nikolaev1, G Yu Yushkov, K P Savkin
1High Current Electronics Institute, Siberian Branch of the Russian Academy of Science, Tomsk 634055, Russia. nik@opee.hcei.tsc.ru
The Review of Scientific Instruments
|March 3, 2012
Summary
This study measured ion beam angular distributions from a MEVVA ion source using a time-of-flight mass spectrometer. Results reveal how discharge parameters and cathode materials (Al, Cu, Ti) affect ion beam characteristics.
Area of Science:
- Plasma physics
- Ion beam generation
- Mass spectrometry
Background:
- Metal Vapor Vacuum Arc (MEVVA) ion sources are crucial for applications requiring ion beams.
- Understanding ion beam divergence is essential for optimizing source performance and application efficiency.
- Previous studies have explored MEVVA source characteristics, but detailed angular distribution data under varying conditions remain important.
Purpose of the Study:
- To experimentally measure and analyze the angular distribution of plasma components and metal ions.
- To investigate the impact of different cathode materials (Aluminum, Copper, Titanium) on ion beam angular spread.
- To determine the influence of vacuum arc discharge parameters on the angular distribution characteristics of the ion beam.
Main Methods:
- Utilized a MEVVA-type ion source for generating metal ions.
- Employed a time-of-flight mass spectrometer for precise measurement of ion charge states and velocities.
- Conducted experiments with varying cathode materials and vacuum arc discharge parameters.
Main Results:
- Quantified the angular distribution of various plasma components and ion charge states.
- Observed distinct angular distribution patterns for different cathode materials (Al, Cu, Ti).
- Demonstrated a correlation between specific discharge parameters and the resulting ion beam angular spread.
Conclusions:
- The angular distribution of ions from MEVVA sources is significantly influenced by both cathode material and discharge parameters.
- The findings provide valuable data for optimizing MEVVA source operation for specific applications.
- Comparison with existing literature highlights the consistency and novelty of the presented results.
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