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Updated: May 24, 2026

Attaching Biological Probes to Silica Optical Biosensors Using Silane Coupling Agents
Published on: May 1, 2012
CMOS-integrated film bulk acoustic resonators for label-free biosensing
Martin Nirschl1, Arto Rantala, Kari Tukkiniemi
1Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany. martin.nirschl.ext@siemens.com
Abstract:
The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

