Wafer-Scale Graphene Field-Effect Transistor Biosensor Arrays with Monolithic CMOS Readout

Area of Science:

• Materials Science and Engineering
• Electrical Engineering
• Biotechnology

Background:

• Point-of-care diagnostics are shifting towards multiplexed detection, demanding reliable and scalable sensing solutions.
• Complementary metal-oxide semiconductor (CMOS) integrated sensing offers miniaturization and high sensor counts for multianalyte detection.
• Graphene field-effect transistor (GFET)-based biosensing is advancing rapidly, but requires improved reliability and statistical data for industrialization.

Purpose of the Study:

• To report wafer-scale fabrication of CMOS-integrated GFET arrays with high yield and uniformity for biosensing applications.
• To demonstrate a platform enabling statistical analysis for quantitative and multiplexed label-free electrical biosensing.
• To address the need for reduced variability in functionalization for on-chip bioassays and improved sensor reliability.

Main Methods:

• Wafer-scale fabrication of CMOS-integrated GFET arrays designed for biosensing.
• Functionalization of GFETs for biorecognition in real sample matrices.
• Simultaneous detection using a 512-GFET sensing platform array.

Main Results:

• Achieved high yield and uniformity in wafer-scale fabrication of CMOS-integrated GFET arrays.
• Demonstrated simultaneous detection of sodium chloride concentration series using the 512-GFET array.
• Established a platform for statistical GFET-based biosensing, paving the way for quantitative and multianalyte sensing.

Conclusions:

• The developed CMOS-integrated GFET arrays provide a reliable platform for statistical biosensing.
• This technology supports quantitative, label-free, and multiplexed detection, crucial for advanced diagnostics.
• The fabrication techniques are applicable to other GFET-based sensing applications, including gas and chemical sensing.