Updated: May 23, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Stefan Busch1, Benedikt Scherger, Maik Scheller
1Fachbereich Physik, Philipps-Universität Marburg, Renthof 5, 35032, Marburg, Germany. stefan.busch@physik.uni‑marburg.de
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We developed a novel spatial modulator for terahertz waves using light-induced plasma in silicon. This technology enables optically controlled beam steering and opens possibilities for advanced terahertz imaging applications.
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