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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Optically controlled terahertz beam steering and imaging.

Stefan Busch1, Benedikt Scherger, Maik Scheller

  • 1Fachbereich Physik, Philipps-Universität Marburg, Renthof 5, 35032, Marburg, Germany. stefan.busch@physik.uni‑marburg.de

Optics Letters
|April 20, 2012
PubMed
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We developed a novel spatial modulator for terahertz waves using light-induced plasma in silicon. This technology enables optically controlled beam steering and opens possibilities for advanced terahertz imaging applications.

Area of Science:

  • Optics and Photonics
  • Condensed Matter Physics
  • Semiconductor Science

Background:

  • Terahertz (THz) waves offer unique properties for various applications.
  • Existing THz spatial modulators often face limitations in modulation depth, frequency range, or control complexity.
  • Photo-active semiconductors provide a promising platform for novel optical control mechanisms.

Purpose of the Study:

  • To propose and demonstrate a novel spatial modulator for terahertz waves.
  • To investigate the use of light-induced electron plasma in semiconductors for THz modulation.
  • To explore optically controlled beam steering and THz imaging capabilities.

Main Methods:

  • Utilizing a two-dimensional array of computer-controlled light sources to generate free carriers in bulk silicon.

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Last Updated: May 23, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Published on: April 1, 2020

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Published on: February 4, 2017

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  • Inducing spatial modulation of terahertz wave transmission through optically controlled plasma.
  • Analyzing the formation of virtual grating structures for beam steering.
  • Investigating all-optical control for terahertz imaging.
  • Main Results:

    • Achieved a remarkable modulation depth for terahertz waves across a broad frequency range.
    • Demonstrated optically controlled beam steering of terahertz waves by creating virtual gratings.
    • Established the feasibility of all-optically controlled terahertz imaging.

    Conclusions:

    • The proposed spatial modulator based on light-induced plasma in semiconductors is highly effective for terahertz wave manipulation.
    • This technology enables significant advancements in terahertz beam steering and imaging.
    • The method offers a versatile and optically controllable platform for future terahertz applications.