Nanofabrication using near-field optical probes.

Euan McLeod1, Aydogan Ozcan

  • 1Electrical Engineering Department, University of California, Los Angeles, California 91801, USA. euanmc@ucla.edu

Summary

Near-field optical probes enable rapid, maskless nanofabrication. Recent advances enhance resolution, incorporate plasmonics, expand applications, and boost throughput for nanostructured devices.

Related Concept Videos