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Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
Published on: September 28, 2019
Formation of Nb2O5 matrix and Vis-NIR absorption in Nb-Ge-O thin film
1Research Institute for Electromagnetic Materials, Sendai, 982-0807, Japan. abe@denjiken.ne.jp.
Abstract:
This paper investigates the crystal structure and optical absorption of Ge-doped Nb-oxide (Nb-Ge-O) thin films prepared by RF sputtering. A wide-gap material, Nb2O5, is selectively produced as a matrix to disperse Ge nanocrystals through compositional optimization with Ge chip numbers and oxygen ratio in argon. The optical-absorption spectra are obviously shifted to visible (vis) and near-infrared (NIR) regions, suggesting that a composite thin film with Ge nanocrystals dispersed in Nb2O5 matrix exhibits quantum-size effects. Accordingly, the two valuable characteristics of the Nb2O5 matrix and the vis-NIR absorption are found to be retained simultaneously in Nb-Ge-O thin films.

