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The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry
Published on: August 12, 2013
Linearization and minimization of cyclic error with heterodyne laser interferometry.
Terry G McRae1, Magnus T L Hsu, Christopher H Freund
1National Measurement Institute Australia, Bradfield Road, Lindfield, New South Wales 2070, Australia. terry.mcrae@measurement.gov.au
Optics Letters
|June 30, 2012
Summary
This study introduces a new method to reduce interferometer cyclic error using polynomial curve fitting. The technique precisely measures and minimizes this error, achieving picometer-level accuracy for improved interferometer performance.
Area of Science:
- Optical Metrology
- Interferometry
- Signal Processing
Background:
- Interferometers are sensitive to cyclic error, which can limit measurement precision.
- Nonlinear mirror displacement is a primary source of this error, complicating analysis.
Purpose of the Study:
- To develop a method for linearization and minimization of interferometer cyclic error.
- To enable precise cyclic error measurement in noisy environments.
- To optimize interferometer configuration and performance.
Main Methods:
- Polynomial curve fitting and resampling algorithm for nonlinear mirror displacement correction.
- Frequency domain analysis to compress cyclic error into a single-frequency component.
- Application to various interferometer components for error determination.
Main Results:
- Successful linearization and minimization of cyclic error.
- Precise measurement of cyclic error achieved even in noise-dominated conditions.
- Routine achievement of ~50 pm cyclic error for a custom Glan-Laser interferometer.
- Routine achievement of ~100 pm cyclic error for a commercial interferometer.
Conclusions:
- The presented method effectively corrects for nonlinearities in interferometers.
- The technique significantly enhances measurement accuracy and allows for interferometer optimization.
- This approach is valuable for achieving high-precision optical measurements.
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