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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
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Investigation of multilayer X-ray optics for the 6 keV to 20 keV energy range

P Oberta1, Y Platonov, U Flechsig

  • 1Rigaku Innovative Technologies Europe, Novodvorská 994, 142 21 Praha 4, Czech Republic. oberta@fzu.cz

Journal of Synchrotron Radiation
|August 18, 2012
PubMed

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