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Updated: May 18, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Measurement of piezoelectric transformer vibrations by digital holography
Pavel Psota1, Vít Lédl, Roman Dolecek
1Institute of Mechatronics and Computer Engineering, Technical University of Liberec, Liberec, Czech Republic. pavel.psota@tul.cz
Abstract:
A method for the measurements of the out-of-plane displacement on the surface of vibrating object is presented herein. This method is based on frequency-shifted time-averaged digital holographic interferometry, employing the principle of phase shifting. This approach allows for significant noise reduction, which results in high sensitivity of measurements. This method makes it possible to measure vibrations with amplitudes in the nanometer range over the whole measured surface. This method was applied to the visualization of the out-of-plane vibration modes of piezoelectric transformers. The amplitude and modal shapes were measured with a very high resolution. Furthermore, aspects influencing the measurement errors are discussed and the measurement results by holographic method were compared with the well-established single-point laser interferometry measurement method.

