Updated: May 18, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
1Department of Electrical and Computer Engineering, the University of British Columbia, Vancouver, BC, Canada. weis@ece.ubc.ca
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We developed compact silicon microdisk resonators for wavelength-selective reflection. These devices offer high quality factors and wide free-spectral ranges, enabling potential applications in multichannel sensing systems.
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