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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Infrared dielectric properties of low-stress silicon nitride

Giuseppe Cataldo1, James A Beall, Hsiao-Mei Cho

  • 1NASA Goddard Space Flight Center, 8800 Greenbelt Road, Greenbelt, Maryland 20771, USA. Giuseppe.Cataldo@nasa.gov

Optics Letters
|October 18, 2012
PubMed

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