Uncertainty: Overview
Scanning Electron Microscopy
Propagation of Uncertainty from Systematic Error
The Uncertainty Principle
Overview of Microscopy Techniques
Uncertainty in Measurement: Accuracy and Precision
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Updated: May 17, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Nicholas W M Ritchie1, Dale E Newbury
1Materials Measurement Science Division, National Institute of Standards and Technology, 100 Bureau Drive, MS 8372, Gaithersburg, Maryland 20899-8372, United States. nicholas.ritchie@nist.gov
Electron probe microanalysis (EPMA) has historically underestimated uncertainty by focusing on precision, not accuracy. This study quantifies key accuracy-related uncertainties in EPMA matrix corrections for improved elemental analysis.
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