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Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Ultrananocrystalline diamond tip integrated onto a heated atomic force microscope cantilever
Hoe Joon Kim1, Nicolaie Moldovan, Jonathan R Felts
1Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL 61801, USA.
Nanotechnology
|November 15, 2012
Summary
This study introduces wear-resistant ultrananocrystalline diamond (UNCD) tips for heated atomic force microscopy (AFM) cantilevers. These durable UNCD tips enable high-resolution thermal imaging and nanolithography applications.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Atomic Force Microscopy (AFM) is a powerful tool for nanoscale imaging and manipulation.
- Conventional AFM tips, particularly silicon-based ones, suffer from wear during prolonged scanning, limiting their durability and application scope.
- The development of wear-resistant AFM tips is crucial for advancing high-resolution surface analysis and nanofabrication.
Purpose of the Study:
- To develop and characterize wear-resistant ultrananocrystalline diamond (UNCD) tips integrated with heated atomic force microscope (AFM) cantilevers.
- To evaluate the performance of these UNCD tips in terms of wear resistance, thermal imaging capabilities, and nanolithography potential.
- To demonstrate the advantages of UNCD tips over conventional silicon tips for demanding AFM applications.
Main Methods:
- Batch fabrication of UNCD tips with approximately 10 nm apex radii and up to 7 μm height.
- Integration of UNCD tips onto solid-state heated AFM cantilevers capable of reaching over 600 °C.
- Wear resistance testing involving 1.2 m of scanning on a silicon grating at 200 nN force and 10 μm/s speed.
- Demonstration of thermal imaging in contact and intermittent contact modes, and nanolithography by writing polyethylene nanostructures.
Main Results:
- UNCD tips exhibited exceptional wear resistance, enduring 1.2 m of scanning without significant blunting, unlike conventional silicon tips.
- The integrated solid-state heater functioned effectively as both a heat source and a resistive temperature sensor.
- High-resolution thermal imaging with a vertical resolution of 1.9 nm was achieved.
- Successful nanolithography was demonstrated by writing hundreds of polyethylene nanostructures using the UNCD tips.
Conclusions:
- Ultrananocrystalline diamond (UNCD) tips offer superior wear resistance for heated AFM cantilevers compared to traditional silicon tips.
- The developed UNCD-integrated heated AFM system is suitable for high-resolution thermal imaging and precise nanolithography.
- This technology holds significant promise for advanced surface analysis and nanoscale fabrication applications.

