Friction measurement on free standing plates using atomic force microscopy.

X S Tang1, Y C Loke, P Lu

  • 1Institute of Materials Research and Engineering, Agency for Science Technology and Research, 3 Research Link, Singapore 117602.

Summary

This study presents a novel atomic force microscopy (AFM) method to measure friction on microfabricated silicon plates. The technique quantifies friction forces at the interface between the plate and substrate, enabling low-load measurements.