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Updated: May 9, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Improved accuracy and speed in scanning probe microscopy by image reconstruction from non-gridded position sensor
Dominik Ziegler1, Travis R Meyer, Rodrigo Farnham
1Lawrence Berkeley National Laboratory, Molecular Foundry, 1 Cyclotron Road, 94720 Berkeley, CA, USA.
Scanning probe microscopy (SPM) achieves higher accuracy and resolution with a new "sensor inpainting" technique. This method uses advanced image processing to reconstruct accurate spatial data, improving quantitative analysis in microscopy.
Area of Science:
- Materials Science
- Nanotechnology
- Physics
Background:
- Scanning probe microscopy (SPM) offers high spatial resolution and non-destructive characterization.
- Accurate spatial data is crucial for quantitative SPM applications, but challenging at high frame rates.
- Current SPM methods often compromise data completeness or temporal resolution.
Purpose of the Study:
- To introduce a novel SPM operation mode using advanced image processing for accurate spatial data.
- To overcome limitations in achieving high-resolution, quantitative SPM imaging.
- To enhance the efficiency and applicability of SPM for in situ studies.
Main Methods:
- Development of a new SPM operation mode termed "sensor inpainting".
- Utilizing advanced image processing techniques to reconstruct images from position sensor data.
- Implementing non-raster scan waveforms (e.g., Archimedean spiral) optimized for nanopositioner dynamics.
Main Results:
- Sensor inpainting enables accurate image rendering independent of the scanner's exact position at any given time.
- Achieved at least a two-fold increase in temporal or spatial resolution compared to traditional raster scanning.
- Demonstrated the ability to generate higher-resolution images by inpainting to more pixels than acquired samples, improving ground truth representation.
Conclusions:
- The sensor inpainting technique significantly enhances the accuracy and resolution of SPM imaging.
- This new mode reduces engineering complexity for position control and allows for more efficient scanning strategies.
- Sensor inpainting broadens the scope of quantitative and high-speed applications for scanning probe microscopy.
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