A versatile ultra high vacuum sample stage with six degrees of freedom

We describe the design and practical realization of a versatile sample stage with six degrees of freedom. The stage was designed for use in a Low Energy Electron Microscope, but its basic design features will be useful for numerous other applications. The degrees of freedom are X, Y, and Z, two tilts, and azimuth. All motions are actuated in an ultrahigh vacuum base pressure environment by piezoelectric transducers with integrated position sensors. The sample can be load-locked. During observation, the sample is held at a potential of -15 kV, at temperatures between room temperature and 1500 °C, and in background gas pressures up to 1 × 10(-4) Torr.